Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results

Abstract

Many of today’ s technologies and research techniques depend on process and methods in high and ultra- high vacuum chambers. High temperature vacuum chambers require innovative concept and use of unusual materials in design to achieve quality performance. In order to obtain quality performance, the temperature and gas delivery on the vacuum chamber surface must be uniformly distributed. In this work, a new funnel for high temperature vacuum chamber was successfully designed and tested using computer - based simulation techniques. The funnel was made of quartz crystal (Grade 2) due to ability to absorb temperature, properties of low gas permeability and low temperature coefficient. In order to mitigate O- rings from high temperature failure and to reduce non-uniformity effect during temperature delivery, a new quartz funnel was developed. The simulation and experimental results show that uniformity distributions in temperature of vacuum chamber surface were obtained with new funnel design.